Industry-Leading Power Delivery System for Ó£ÌÒɬ¸£Àû¼§’s DC Gridded Ion Sources
Ó£ÌÒɬ¸£Àû¼§’s SOLUSâ„¢ DC Ion Source Controller features a state-of-the-art precision control system design, providing reliable and stable power for ion source operation in all types of processes. Integrated power modules and gas flow control with ratio capabilities allow for optimal ion source control and performance in the most demanding process environments.