Chemists have synthesized many exciting new precursors for ALD and have created a large number of atomic layer deposition materials, such as coatings with improved properties for metals, semiconductors, insulators, oxides, nitrides, dielectrics, magnetic, and refractive coatings.
| OXIDES | NITRIDES | SULFIDES | METALS / TELLURIDES | |||||
|---|---|---|---|---|---|---|---|---|
| AI2O3 | Fe2O3 | Li3PO4 | NiFe2O4 | V2O5 | AlGaN | MnN | CdS | Co |
| Al:HfO2 | Fe3O4 | LiPON | NiO | WO3 | AlN | NbN | CoS | Cu |
| Al:ZnO | FePO4 | LiFePO4 | NiO | Y2O3 | BxGa1-xN | NbTiN | Cu2S | Fe |
| AlGaN | Ga2O3 | Li2MnO4 | PO4 | YSZ | BxIn1-xN | SiN | Cu2ZnSnS4 | Mn |
| BOx | HfO2 | Li5TaOz | SiO2 | ZnAl2O4 | CoN | TaN | In2S3 | Ni |
| BiFeO3 | HfSiON | MgO | SnO2 | ZnO | Hf3N4 | TiN | MnS | Pd |
| CeO2 | In2O3 | MnO2 | SrO | ZnMgO | InAlN | WN | PbS | Pt |
| Co3O4 | ITO | MoO3 | SrTiO3 | ZnOS | InGaN | ZrN | Sb2S3 | Ru |
| CoFe2O4 | La2O3 | NaTiO | Ta2O5 | ZrO2 | InN | SnS | Bi2Te3 | |
| Er2O3 | Li2O | Nb2O5 | TiO2 | ZnS | Sb2Te3 | |||